| 摘要 |
The present invention relates to an assembly of variable capacitance as well as to a method of operating the assembly. In the assembly, a variable capacitor is formed by a variable coverage or a variable distance of at least one first (4) and one second electrically conductive region (5). The first electrically conductive region (4) is configured on or in a substrate (1) and said second electrically conductive region (5) is configured on or in an actuator element (3) of a first micro-mechanical actuator (2). The actuator (2) is disposed on the substrate (1) in such a way that it can perform a movement of the actuator element (3) with the second region (5) along a surface of the substrate (1) at different positions relative to the first region (4), at which positions the second region (5) overlaps the first region (4) at least partly. Moreover, holding means (6, 10, 11) are provided which are capable of pulling or pushing the actuator element (3) in the different positions towards the substrate (1) or a mechanical stop (13) on the substrate (1), and of holding it in these positions. The inventive assembly serves to implement a variable capacitance that presents a high stability in resistance to outside influences according to its respective setting.
|
