发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device for preventing drop of the breakdown voltage between the emitter and the collector, and suppressing drop and variation of a current gain hFE. SOLUTION: In an region for forming elements, the surface of a N<SP>-</SP>epitaxial layer 2 slopes upward from an end of a field oxide film 3 to a sidewall of an opening 25. An external base diffused layer 8, formed on the N<SP>-</SP>epitaxial layer 2, slopes upward from a side of the field oxide film 3 to the sidewall of the opening 25, which is exposed. The sidewall of the opening 25, where the external base diffused layer 8 is exposed, is tapered. The lower end of the opening 25 of the external base diffused layer 8 is at about the same deep position as the bottom of the opening 25 or at a position shallower than the bottom. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004022720(A) 申请公布日期 2004.01.22
申请号 JP20020174101 申请日期 2002.06.14
申请人 RENESAS TECHNOLOGY CORP 发明人 FUJII HIDENORI
分类号 H01L21/331;H01L21/762;H01L29/08;H01L29/10;H01L29/417;H01L29/732;(IPC1-7):H01L21/331 主分类号 H01L21/331
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