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发明名称
Method for inspecting semiconductor devices using electron mirror microscopy
摘要
申请公布号
US3404271(A)
申请公布日期
1968.10.01
申请号
US19660591448
申请日期
1966.11.02
申请人
SPRAGUE ELECTRIC COMPANY
发明人
LEHOVEC KURT;SCHIER HANS
分类号
G01R31/265;H01L21/00
主分类号
G01R31/265
代理机构
代理人
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地址
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