| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample inspection apparatus that is devised diversely and can fully inspect the sample of an optical member or the like such as an optic element. SOLUTION: The sample inspection apparatus comprises: a light guiding means 9 for guiding illumination light from an illumination light source; a hemisphere section 6 having a light emission port 8 that uniformly disperses the illumination light that is guided by the light guiding means 9 and has a specific illuminance and emits the illumination light outside; and a darkroom section 7 for giving a black background. In the sample inspection apparatus, the sample 22 arranged near the light emission port at the hemisphere section 6 is inspected on the black background supplied to a working personnel by the darkroom section 7, and a light shielding sections 14 and 15 are arranged to remove light interfering with the inspection of the illumination light. COPYRIGHT: (C)2004,JPO
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