| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus, etc., for more accurately measuring the amount of displacement than before in displacement measurement by triangulation using a noncontact displacement gauge. SOLUTION: The measuring apparatus is constituted of a mounting base 20; the noncontact displacement gauge 30; a support means 16; feed mechanism parts 14, 21, and 23; a feed control means 43; a shape data creating means 47, etc. The feed control means 43 moves the support means 16 and the mounting base 20 with respect to each other so that laser beam emitted from the noncontact displacement gauge 30 may irradiate an predetermined area including a point to be measured and the surface of an object M to be measured through a preset route. The shape data creating means 47 samples data on the locations of light reception received from a light receiving element 32 of the noncontact displacement gauge 30 at preset intervals of a movement route; computes the amount of displacement at the location of laser beam reception in the surface of the object to be measured on the basis of the acquired data on each location of light reception; computes an average value of the computed amounts of displacement; and takes the average value as the amount of displacement of the point to be measured. COPYRIGHT: (C)2004,JPO
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