| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a corrosion resistant member which is provided with a sprayed coating having reduced surface roughness as-sprayed, reduced pores, high insulation properties and high adhesive force, has reduced particles under a corrosive plasma gas environment and is suitable for a member requiring high insulation properties. <P>SOLUTION: The corrosion resistant member is used under a corrosive plasma gas atmosphere, and in which at least the part exposed to a corrosive plasma gas is covered with a sprayed coating of oxide ceramics. A ceramics raw material is charged to a plasma arc generation part using a thermal spraying device provided with a cathode torch 2 and mutually separated two anode torches 3a and 3b, so that the raw material is thermally sprayed while it is melted to form the sprayed coating 52 on the surface a substrate 53. Thus, the surface roughness Ra as-sprayed of the sprayed coating 52 is controlled to ≤5 μm, the cumulative volume of pores with a pore size of 0.1 to 100 μm is controlled to ≤0.0080 cc/g, volume resistivity is controlled to ≥1×10<SP>6</SP>Ω cm, and adhesive strength is controlled to ≥10 MPa. <P>COPYRIGHT: (C)2004,JPO |
