| 摘要 |
PROBLEM TO BE SOLVED: To provide a contamination prevention method for easily preventing contamination in optical components and an optical device utilizing the method. SOLUTION: The optical device comprises an optical system chamber 1 where the optical components and a first light source are provided, and a spare chamber 4 for removing impurities in introduced gas and for supplying the gas after removing the impurities to the first chamber. Additionally, the optical device has a plurality of layers of quartz filter paper 5 for depositing the impurities in the spare chamber 4, and a heavy hydrogen lamp 6 for irradiating the quartz filter paper 5 with light. Then, the impurities contained in the gas passing through the quartz filter paper 5 are deposited for removal on the quartz filter paper 5 due to photochemical reaction generated by far-ultraviolet rays from the heavy hydrogen lamp. COPYRIGHT: (C)2004,JPO
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