| 摘要 |
A specimen stage for providing accurate positional control of the specimen and accurate thermal control. Positional control is provided by mounting the specimen mount on a spindle, rotatable about its axis and moveable laterally and axially. The specimen spindle has a conical surface which engages a thermal control block which floats with a small downward pressure on the specimen spindle. The thermal control block is counter balanced and mounted on an unrestrained 3-axis slide. The thermal control block includes heaters and coolers to control the temperature of the specimen. The specimen spindle includes a thin-walled tube as a thermal isolator, and is in turn connected to a rotary servo and encoder and linear servo motors. Thus, thermal control is provided by the thermal block, which is independent of the motion control provided by moving the specimen spindle. |
