发明名称 |
METHOD AND APPARATUS FOR AUTOMATIC SENSOR INSTALLATION |
摘要 |
Graphical User Interfaces (GUIs) are presented for configuring and setting-up sensors for monitoring tool and process performance in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired configuration and setup tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser. |
申请公布号 |
WO2004006140(A2) |
申请公布日期 |
2004.01.15 |
申请号 |
WO2003US19041 |
申请日期 |
2003.06.18 |
申请人 |
TOKYO ELECTRON LIMITED;FUNK, MERRITT;HARTMANN, STEVEN |
发明人 |
FUNK, MERRITT;HARTMANN, STEVEN |
分类号 |
G06F3/048;G05B19/418;G06F3/00;G06F17/50;G06F19/00;H01L21/00;H01L21/02 |
主分类号 |
G06F3/048 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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