发明名称 JAM DETECTING SYSTEM OF PLATING APPARATUS
摘要 PURPOSE: A jam detecting system of a plating apparatus is provided to be capable of minimizing plating failure due to the jam and deviation phenomenon of a lead frame by installing a sensor part at the input and output port of each cell. CONSTITUTION: A jam detecting system of a plating apparatus is provided with a sensor part(21) for detecting the jam and deviation phenomenon of a lead frame, a control part(23) for controlling a plating apparatus by receiving the signal detected from the sensor part, and a display part(25) connected to the control part. At this time, the sensor part includes an input port proximity sensor(22) installed at the input port of the cell for detecting the jam phenomenon of the lead frame and an output port proximity sensor(24) installed at the output port of the cell for detecting the deviation phenomenon of the lead frame.
申请公布号 KR20040004728(A) 申请公布日期 2004.01.14
申请号 KR20020035957 申请日期 2002.06.26
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, GI CHUL;KIM, JONG WON;KO, YUN SEOK;LEE, MYEONG GU;LIM, HYO SIN;NA, BYEONG DO;PARK, GANG GYU
分类号 H01L21/50;(IPC1-7):H01L21/50 主分类号 H01L21/50
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