发明名称 Planar-constructed spatial micro-stage
摘要 A multiple degree of freedom platform assembly formed from a plurality of thin films on a substrate can, when activated, move out of the plane of the substrate without additional manufacturing steps. The platform is connected to the substrate by at least three linkages, each linkage being pivotally connected to the platform and the base. At least two of the base connections are to powered traveling devices that are manufactured at one end of a path and which may be moved to locations along the path to cause the platform to move to predetermined positions. The entire assembly, including hinges, is manufactured as planar structures; preferably by a thin film technology such as MEMS.
申请公布号 US6675671(B1) 申请公布日期 2004.01.13
申请号 US20020153109 申请日期 2002.05.22
申请人 SANDIA CORPORATION 发明人 JOKIEL, JR. BERNHARD;BENAVIDES GILBERT L.;BIEG LOTHAR F.;ALLEN JAMES J.
分类号 B23Q1/54;B25J7/00;B25J9/10;B81B7/00;(IPC1-7):B25J7/00 主分类号 B23Q1/54
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