发明名称 Method for electro chemical mechanical deposition
摘要 The present invention deposits a conductive material from an electrolyte solution to a predetermined area of a wafer. The steps that are used when making this application include applying the conductive material to the predetermined area of the wafer using an electrolyte solution disposed on a surface of the wafer, when the wafer is disposed between a cathode and an anode, and preventing accumulation of the conductive material to areas other than the predetermined area by mechanically polishing the other areas while the conductive material is being applied.
申请公布号 US6676822(B1) 申请公布日期 2004.01.13
申请号 US20000607567 申请日期 2000.06.29
申请人 NUTOOL, INC. 发明人 TALIEH HOMAYOUN
分类号 C25D7/12;B23H5/08;B24B37/04;C25D5/02;C25D5/06;C25D5/08;C25D5/22;C25D17/06;C25D21/12;H01L21/288;H01L21/304;H01L21/321;(IPC1-7):C25D5/22;C25D21/18 主分类号 C25D7/12
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