| 摘要 |
FIELD: mechanical engineering; positioning parts in nanotechnology. SUBSTANCE: displacement unit has stage and guide, six piezoelectric transducers coupled with stage and guide using l-coordinate structure. Piezoelectric transducers are coupled with stage and guide by means of twelve respective flexible torsion bars. Newly introduced in displacement unit are six drives and fixed base. Drives are coupled with guide and base through twelve respective articulated joints also using L- coordinate structure. Articulated joints and torsion bars are disposed on different ends of guide. EFFECT: enhanced precision and enlarged range of linear and angular displacements; enlarged kinematic capabilities of unit. 1 cl, 1 dwg |
