摘要 |
According to one embodiment of the invention, a method is provided. The method includes lining, with a conductive liner, a surface of a dielectric layer. The surface defines at least two trenches separated by a platform. Each of the defined trenches includes a conductor that overlies the conductive liner and is positioned within the each of the defined trenches. The conductor electrically coupled to the conductive liner. The method also includes covering the portion of the conductive liner overlying the platform after lining the surface. The method also includes removing any uncovered portions of the conductive liner while leaving in place the portion of the conductive liner that was covered.
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