发明名称 METHODS FOR FORMING A FUSE IN A SEMICONDUCTOR DEVICE
摘要 According to one embodiment of the invention, a method is provided. The method includes lining, with a conductive liner, a surface of a dielectric layer. The surface defines at least two trenches separated by a platform. Each of the defined trenches includes a conductor that overlies the conductive liner and is positioned within the each of the defined trenches. The conductor electrically coupled to the conductive liner. The method also includes covering the portion of the conductive liner overlying the platform after lining the surface. The method also includes removing any uncovered portions of the conductive liner while leaving in place the portion of the conductive liner that was covered.
申请公布号 US2004005776(A1) 申请公布日期 2004.01.08
申请号 US20020188528 申请日期 2002.07.03
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 HAVEMANN ROBERT H.
分类号 H01L23/525;H01L23/532;H01L27/108;(IPC1-7):H01L21/320 主分类号 H01L23/525
代理机构 代理人
主权项
地址