摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat treatment furnace capable of reducing heat treatment time, reducing working processes, and carrying out certain heat treatment at low cost without using a heat treating fixture such as a box or a base plate. <P>SOLUTION: The heat treatment furnace comprises a furnace body including a heat treating space, a substantially cylindrical furnace core pipe inclined longitudinally, a rotation driving means for rotating the furnace core pipe, and a heater for heating a heat treated object. The furnace core pipe comprises a substantially cylindrical outer furnace core pipe and an inner furnace core pipe disposed inside the outer furnace core pipe. The inner furnace core pipe is made of a material capable of preventing reaction with the heat treated object. <P>COPYRIGHT: (C)2004,JPO |