发明名称 PIEZOSTACK AND METHOD FOR PRODUCING A PIEZOSTACK
摘要 The invention relates to a method for producing a piezostack, whereby the asymmetry of the electrically inactive zones (2, 2.1, 2.2) in a piezostack (5) having electrically inactive zones (2, 2.1. 2.2) on a plurality of sides thereof is determined, and the electrically inactive zone with an oversize is then reduced until the asymmetry reaches an acceptable proportion.
申请公布号 WO03073524(A3) 申请公布日期 2004.01.08
申请号 WO2003DE00305 申请日期 2003.02.04
申请人 SIEMENS AKTIENGESELLSCHAFT;SCHUERZ, WILLIBALD 发明人 SCHUERZ, WILLIBALD
分类号 H01L41/083;H01L41/253;H01L41/337;H02N2/04 主分类号 H01L41/083
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