| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator using a Pb-free barium titanate as a piezoelectric material. SOLUTION: This piezoelectric actuator is provided with a buffer layer (b) epitaxially formed on an Si substrate (a) and composed of an oxide or nitride, a lower electrode (c) composed of a transition metal oxide (or, metal) provided with pseudo-cube (100) or (111)-orientation having a perovskite structure, and a piezoelectric layer (d) formed on the lower electrode (c) and composed of (Ba<SB>1-x</SB>M<SB>x</SB>)(Ti<SB>1-y</SB>Z<SB>y</SB>)O<SB>3</SB>(wherein, M and Z respectively designate Sr or Ca and Zr or Hf, 0≤x≤0.3, and 0≤y≤0.2) and provided with mimetic cubic crystals (001) or (111)-orientation. This actuator is also provided with an upper electrode formed on the piezoelectric layer. COPYRIGHT: (C)2004,JPO |
