发明名称 |
DC power supply apparatus for generating plasma |
摘要 |
A DC power supply apparatus for supplying a DC power to a plasma generating device, includes: an input section for converting an inputted AC power into a DC power; a current type of inverter connected with a next stage of the input section; a transformer having a primary winding and a secondary winding, the primary winding being connected with the current type of inverter; a rectifying section for rectifying an AC power generated in the secondary winding of the transformer; and a smoothing circuit for smoothing the rectified power which is rectified by the rectifying section; wherein an electric energy to be supplied to the plasma generating device is controlled by controlling a switching operation of the current type of inverter as a current source.
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申请公布号 |
US2004004848(A1) |
申请公布日期 |
2004.01.08 |
申请号 |
US20020228330 |
申请日期 |
2002.08.27 |
申请人 |
KYOSAN ELECTRIC MFG. CO. LTD. |
发明人 |
YUZURIHARA ITSUO;ARAI MASAMI |
分类号 |
H02M3/28;H02M3/337;(IPC1-7):H02M3/335 |
主分类号 |
H02M3/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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