| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a transmitted electron beam intensity distribution image with high accuracy in regard to a method for forming a transmitted electron beam intensity distribution image of a contractive material by irradiating the contractive material with an electron beam. SOLUTION: This method is used for forming a transmitted electron beam intensity distribution image by irradiating the contractive material with an electron beam. The size of an incident electron beam is 0.1 to 2 nm, the scanning speed of the electron beam is 20 to 400 sec/frame, the current of the electron beam on a surface of the material is 1×10<SP>-12</SP>to 1×10<SP>-9</SP>A, and acceleration voltage for the electron beam is 50 to 400 kV. COPYRIGHT: (C)2004,JPO
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