| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal actuator constituted of a double-motion means to move the thermal actuator in the substantially opposite direction to allow quick return of the actuator for slight positioning and quicker repetition. SOLUTION: This heat actuator includes a substrate base element 10 and a cantilever beam element extending from the substrate base element. The cantilever beam element 20 is constituted of an insulating material furnished with low temperature conductivity and adhered between a first deflecting layer 22 and a second deflecting layer 24, and both of them are constituted of a resistant material furnished with the substantially same coefficient of thermal expansion. The first deflecting layer 22 or the second deflecting layer 24 is thermally expanded by heating, and the cantilever beam element 20 is deflected on the opposite side of the expanded deflecting layer. COPYRIGHT: (C)2004,JPO
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