METHOD FOR MANUFACTURING MICROCRYSTAL THIN FILM STRUCTURAL BODY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a planar or three-dimensional thin film structural body having a microcrystal material or a material having amorphous and microcrystal parts gradiently existing. SOLUTION: An amorphous thin film is formed by a composition having a supercooled liquid region and a film forming condition to form an amorphous thin film structural body. The amorphous thin film structural body is maintained in a prescribed structure and heat treatment to generate microcrystal is performed to manufacture the microcrystal thin film structural body. By using a heating and holding method to generate thermal gradient, the microcrystal thin film structural body having specific solute part and the microcrystal part gradiently existing is manufactured. COPYRIGHT: (C)2004,JPO