| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe position correction method for deriving a high precision observation images by compensating for the errors due to the migration of the probe within XY face, accompanying its movement in Z direction. SOLUTION: Stages consists of stages where probes measures traveling amount within exhibit XY face, accompanying the movement in the height direction, and of which compensates probes position based on the traveling amount. At stages which measures the traveling amount within the XY face, it is instrumentation that is only strange, profile measures known a test piece, and travelling rate is calculated by comparing profile of cross-sectional image obtained from observed image, and test piece. At stages which compensates for the probe position, compensation is performed for the coordinates of the pixels, which compose the observation image or for the probe position performed by moving probes so that traveling amount is compensated for obtaining the observed image. COPYRIGHT: (C)2004,JPO
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