| 摘要 |
PROBLEM TO BE SOLVED: To provide a quartz glass part which is surface-roughened without forming a microcrack or an edgy surface and capable of being used for a film forming apparatus, a heating apparatus, a plasma apparatus or the like at a temperature ranging form a room temperature to a high temperature with the small occurrence of particles for a long period and on which a deposited film after use is easily removed and a manufacturing method of the same. SOLUTION: The quartz glass part is constituted so that a quartz thermally sprayed film having 1-100μm surface roughness Ra is formed on the surface of a base material of a quartz glass, a ceramic or a metal and the manufacturing method of the quartz glass part is provided. COPYRIGHT: (C)2004,JPO
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