发明名称 Method for making an anti-reflection coating on a substrate for the production of a polarizer
摘要 A method for making an anti-reflection coating on a plastic substrate for the production of a polarizer includes the steps of (a) placing the plastic substrate and a target in a vacuum chamber in such a manner that the substrate and the target are spaced apart from each other by a distance greater than 60 centimeters, (b) maintaining the chamber at a temperature less than 60° C., (c) applying an electron beam to the target so as to form a vapor, which is subsequently deposited on the substrate to form a film thereon, and (d) simultaneously bombarding the substrate and the vapor with an ion beam during the formation of the film.
申请公布号 US2004005416(A1) 申请公布日期 2004.01.08
申请号 US20020188413 申请日期 2002.07.03
申请人 COSMOS VACUUM TECHNOLOGY CORPORATION 发明人 CHOU CHUNG-LIN
分类号 C23C14/22;(IPC1-7):C23C14/28;B05D5/06 主分类号 C23C14/22
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