发明名称 APPARATUS FOR CLEANING COATING DIE
摘要 PURPOSE: An apparatus for cleaning a coating die is provided to clean the coating die and form uniformly a surface of a die lip without contamination by using a non-contact cleaning method. CONSTITUTION: An apparatus for cleaning a coating die includes a base(150) and a cleaning block(120). The cleaning block(120) is installed on an upper surface of the base(150). The cleaning block(120) has a cleaning groove(121) corresponding to a shape of a bottom of a coating die(110). The cleaning groove(121) is formed on an upper surface of the cleaning block(120). A plurality of connection holes(122) are formed on the upper surface of the cleaning block(120) in order to connect both sides of the cleaning block(120) to the cleaning groove(121). A nozzle portion(123) includes a plurality of slits(123a) which are formed at each exit of the connection holes(122).
申请公布号 KR20040000631(A) 申请公布日期 2004.01.07
申请号 KR20020035138 申请日期 2002.06.22
申请人 SAMSUNG SDI CO., LTD. 发明人 JANG, DONG GEUN;JUNG, BYEONG HYEON
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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