发明名称 |
APPARATUS FOR CLEANING COATING DIE |
摘要 |
PURPOSE: An apparatus for cleaning a coating die is provided to clean the coating die and form uniformly a surface of a die lip without contamination by using a non-contact cleaning method. CONSTITUTION: An apparatus for cleaning a coating die includes a base(150) and a cleaning block(120). The cleaning block(120) is installed on an upper surface of the base(150). The cleaning block(120) has a cleaning groove(121) corresponding to a shape of a bottom of a coating die(110). The cleaning groove(121) is formed on an upper surface of the cleaning block(120). A plurality of connection holes(122) are formed on the upper surface of the cleaning block(120) in order to connect both sides of the cleaning block(120) to the cleaning groove(121). A nozzle portion(123) includes a plurality of slits(123a) which are formed at each exit of the connection holes(122).
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申请公布号 |
KR20040000631(A) |
申请公布日期 |
2004.01.07 |
申请号 |
KR20020035138 |
申请日期 |
2002.06.22 |
申请人 |
SAMSUNG SDI CO., LTD. |
发明人 |
JANG, DONG GEUN;JUNG, BYEONG HYEON |
分类号 |
H01L21/304;(IPC1-7):H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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