| 摘要 |
PURPOSE: To detect the position of a mark to be inspected, with respect to an original point provided on a substrate, regardless of the positioning point of the mark in the area of the visual field of a device. CONSTITUTION: The device for detecting the position of mark is provided with illuminating means(13-19) which illuminate an objective substrate, an imaging means(1924) which makes images, based on the light reflected from the substrate and outputs image signals, and a measuring means 25 which measures the fixed-pattern noise of the device, based on first image signals fetched from the imaging means(1924) when a reference substrate, having known reflection characteristics, is used as the objective substrate. The device is also provided with a storage means 26, which stores the fixed-pattern noise and a calculating means 25 which calculates the position of the mark to be inspected, based on second image signals fetched from the imaging means(1924) and the fixed-pattern noise stored in the storage 26, when a substrate 11, to be inspected on which the mark to be inspected is formed, is used as the objective substrate. |
