| 摘要 |
PURPOSE: An automatic send-back system is provided to connect two fabrication lines to each other and integrally control a plurality of automatic send-back systems arranged on the fabrication lines by a single controller. CONSTITUTION: An automatic send-back system includes a plurality of fabrication systems(52a,52b,62a,62b), first and second fabrication lines(55,65) adjacent to the fabrication systems, and a connection line(75) connecting the first and second fabrication lines. The first and second fabrication lines and the connection line are mounted by magnetics(70) by a uniform interval, so that first to fourth AGVs(54,56,64,66) respectively disposed on the fabrication lines travel along the magnetics for conveying cassettes of the fabrication systems. The magnetics of the connection line are mounted in the shape of arc for making the first to fourth AGVs change travel path from the first line to the second line and vise versa. An AGV controller(60) remotedly controls the AGVs. The AGV controller receives position information from the AGVs and cassette carrying information of the fabrication systems to calculate the travel path. |
