发明名称 |
SEMICONDUCTOR DEVICE HAVING ISOLATION REGION OF CONSTANT WIDTH AND FABRICATING METHOD THEREFOR |
摘要 |
PURPOSE: A semiconductor device having an isolation region of constant width and a fabricating method therefor are provided to improve a characteristic of a cell transistor and a contact resistance by forming a narrow trench in an inactive region. CONSTITUTION: A semiconductor device having an isolation region of constant width includes a semiconductor substrate, a trench, and an isolation layer. The semiconductor substrate includes an active region(101) and an inactive region(103). A plurality of unit elements are formed on the active region(101). The inactive region(103) has a dummy region and the same width to the X/Y direction. The dummy region is inserted into the inactive region. The trench has the narrow width and corresponds to the inactive region. The isolation layer is formed within the trench.
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申请公布号 |
KR20040000758(A) |
申请公布日期 |
2004.01.07 |
申请号 |
KR20020035697 |
申请日期 |
2002.06.25 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, JI YEONG;PARK, JE MIN |
分类号 |
H01L21/762;(IPC1-7):H01L21/762 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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