发明名称 SEMICONDUCTOR DEVICE HAVING ISOLATION REGION OF CONSTANT WIDTH AND FABRICATING METHOD THEREFOR
摘要 PURPOSE: A semiconductor device having an isolation region of constant width and a fabricating method therefor are provided to improve a characteristic of a cell transistor and a contact resistance by forming a narrow trench in an inactive region. CONSTITUTION: A semiconductor device having an isolation region of constant width includes a semiconductor substrate, a trench, and an isolation layer. The semiconductor substrate includes an active region(101) and an inactive region(103). A plurality of unit elements are formed on the active region(101). The inactive region(103) has a dummy region and the same width to the X/Y direction. The dummy region is inserted into the inactive region. The trench has the narrow width and corresponds to the inactive region. The isolation layer is formed within the trench.
申请公布号 KR20040000758(A) 申请公布日期 2004.01.07
申请号 KR20020035697 申请日期 2002.06.25
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, JI YEONG;PARK, JE MIN
分类号 H01L21/762;(IPC1-7):H01L21/762 主分类号 H01L21/762
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