HEAT-DRIVEN MICRO MIRROR AND ELECTRONIC APPARATUS

摘要

PURPOSE: A heat-driven micro mirror and an electronic apparatus are provided to prevent the movement of the reflecting position of light on a mirror surface by preventing that the rotary center of the mirror surface is deviated and miniaturizing the size of the mirror surface. CONSTITUTION: A thermally driven micro mirror(10) includes a mirror surface(20) and a supporting structure part(14) supporting the mirror surface and having a laminated structure. The supporting structure part applies electricity and generates heat. The supporting structure part is deflected in the laminated structure by the difference of a thermal expansion coefficient, and the mirror surface is tilted in a certain angle. The supporting structure part is disposed between the mirror surface and an electrode part(30) supplying the electricity. A longitudinal axis(LL) of the supporting structure part is perpendicular to a center axis(CL) of the mirror surface(20). A longitudinal center of the supporting structure part(14) is located in the center axis of the mirror surface.