| 摘要 |
<p>A combination of active and passive force actuators provide adjustments to the shape of an optical element to reduce or compensate for aberrations in an optical system. Passive actuators at a high spatial frequency are capable of correcting higher order steady state components of shape error while dynamic corrections of higher frequency, operationally dependent is provided allowing the number of active actuators and the power supplied to each active actuator to be reduced; reducing heating of the optical element by the active actuators and increasing stability of the system. Compound actuators including a combination of an active actuator portion (240) with a passive actuator portion (250) (which provides a mechanical force bias to the active actuator portion) allows increased spatial flexibility of application of forces to the optical element and other advantages. <IMAGE></p> |
