| 摘要 |
PURPOSE: A wafer holder arm is provided to prevent wafer inclination or wafer stress when the wafer is transferred from the wafer storage cassette to the wafer washing stage. CONSTITUTION: A wafer holder arm(13) has its outer end having "C" shape. The bifurcate outer end is formed to extend to the outside of a wafer(11) placed on a wafer washing stage(14). With this configuration, a stable transfer or support of the wafer is achieved.
|
