发明名称 Compositions for preparing materials with a low dielectric constant
摘要 <p>Materials with a low dielectric constant and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present invention, the performance of the dielectric material may be improved by controlling the weight percentage of ethylene oxide groups in the at least one porogen.</p>
申请公布号 EP1376671(A1) 申请公布日期 2004.01.02
申请号 EP20030012119 申请日期 2003.05.30
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 PETERSON, BRIAN KEITH;KIRNER, JOHN FRANCIS;WEIGEL, SCOTT JEFFREY;MACDOUGALL, JAMES EDWARD;DEIS, DEIS, THOMAS ALLEN;BRAYMER, THOMAS ALBERT;CAMPBELL, KEITH DOUGLAS;DEVENNEY, MARTIN;RAMBERG, C. ERIC;CHONDROUDIS, KONSTANTINOS;CENDAK, KEITH
分类号 B32B27/00;C01B;C01B33/12;C04B35/14;C08K5/09;C08L101/00;C09D1/00;H01B3/12;H01L21/312;H01L21/316;(IPC1-7):H01L21/316 主分类号 B32B27/00
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