发明名称 |
Adherent all-gold electrode structure for lithium niobate based devices and the method of fabrication |
摘要 |
An electrode structure wherein galvanic corrosion at adhesion layers formed between electrodes and electronic or electro-optic substrates is eliminated. The electrode structure includes an electro-optic crystalline substrate, an amorphous layer disposed on the crystalline substrate, the amorphous layer having a composition substantially similar to a composition of the crystalline substrate, and a gold layer disposed directly on the amorphous layer. The amorphous layer is created using ion sputtering etching techniques that clean and activate the surface of the crystalline substrate such that the gold layer is able to adhere to it.
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申请公布号 |
US2004002205(A1) |
申请公布日期 |
2004.01.01 |
申请号 |
US20030393508 |
申请日期 |
2003.03.20 |
申请人 |
JDS UNIPHASE CORPORATION |
发明人 |
CHEN XINGFU;LYNCH DANIEL;MARK NELSON;BOSENBERG WALTER;XU JASON;BRODSKY LAWRENCE;CLARK JOHN |
分类号 |
G02F1/03;(IPC1-7):H01L21/44 |
主分类号 |
G02F1/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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