METHOD FOR MAKING INORGANIC NANO-TUBE

摘要

PURPOSE: Provided is a method for making an inorganic nano-tube, which is applied to various inorganic nano-tubes, is compatible with other micro-processing techniques and produces a regular array of inorganic nano-tubes. CONSTITUTION: The method for making an inorganic nano-tube comprises the steps of: (a) preparing a template on which a carbon nano-tube or a carbon nano-tube array is formed; (b) performing the vacuum deposition of an inorganic material on the template by means of atomic layer deposition to form an inorganic nano-tube on the outer surface of the carbon nano-tube; and (c) removing the carbon nano-tube to obtain the inorganic nano-tube or inorganic nano-tube array by the interconnected inorganic nano-tubes. More particularly, the inorganic material in the step (b) is preferably ruthenium.