发明名称 |
METHOD FOR FABRICATING MOLD OF LCD BACKLIGHT DEVICE BY ULTRAVIOLET PHOTO ETCHING |
摘要 |
PURPOSE: A method for fabricating a mold of an LCD backlight device by ultraviolet photo etching is provided to obtain a backlight mold with superior surface roughness in various shapes by processing a mold object through ultraviolet photo etching, wherein the reproducibility is very high so that the mass production is realized. CONSTITUTION: A method for fabricating a mold of an LCD backlight device by ultraviolet photo etching includes the steps of doping a positive ultraviolet photosensitive element(20) on a silicon substrate(10) with a thickness of about 30μm through first and second rotation doping, and transferring an ultraviolet mask(30) pattern to the positive ultraviolet photosensitive element by radiating ultraviolet rays(40) to the pattern with inclination, thereby forming a structure with the photosensitive element stick on the substrate. A plating seed layer is formed on the substrate for electroplating, and a metal layer is formed with a predetermined thickness. The mold is finished by removing the substrate and the positive ultraviolet photosensitive element from the metal layer. |
申请公布号 |
KR20030097007(A) |
申请公布日期 |
2003.12.31 |
申请号 |
KR20020034128 |
申请日期 |
2002.06.18 |
申请人 |
POSTECH FOUNDATION |
发明人 |
HAN, MAN HUI;LEE, SEONG GEUN;LEE, SEUNG SEOP;LEE, UN SEOP |
分类号 |
G02F1/13 |
主分类号 |
G02F1/13 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|