发明名称 KINEMATIC LENS MOUNT WITH REDUCED CLAMPING FORCE AND LITHOGRAPHY SYSTEM
摘要 <p>A kinematic lens mount for kinematically mounting an optical element has a holder structure (18) and three clamping units (20), each affixed to the holder structure and kinematically clamping a peripheral portion of the optical element (12). Each of these clamping units includes a flexure mount (22) affixed to the holder structure and a spring assembly (35) including a resilient member (36) contacting the optical element. A lens seat (24) is formed integrally with or attached to the flexure mount (22) for supporting the peripheral portion of the optical element (12) thereon. The flexure mount (22) includes a pair of flexure devices (30). One end of each of these flexure devices is affixed to the holder structure. Each of these flexure devices may be of a pivot type flexure points (31, 32), having an axis broken lines along which it is stiff and the axes of this pair of flexure devices intersect each other inside the peripheral portion of the optical element.</p>
申请公布号 WO2004001478(A1) 申请公布日期 2003.12.31
申请号 WO2003US18925 申请日期 2003.06.17
申请人 NIKON CORPORATION 发明人 WATSON, DOUGLAS, C.
分类号 G02B7/02;G03F7/20;(IPC1-7):G02B7/02;G02B7/192;G02B7/185 主分类号 G02B7/02
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