HALOGEN LAMP FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: A halogen lamp is provided to lengthen the useful life of the halogen lamp and achieve improved uniformity of wafer by transferring heat to the wafer in a uniform manner. CONSTITUTION: A halogen lamp(100) comprises a connection unit(110) having a pair of connection terminals(111,112) applied with a current; a filament(120) electrically connected to the connection terminals of the connection unit, and which receives a current and emits light; and a lamp tube(130) arranged on the connection unit, and which has the filament mounted in the lamp tube, and a gas injection port for filling a halogen gas.