| 摘要 |
Control of fluid motion within microcavities is carried out using microstructures in the cavities having cantilever elements that are coupled to a substrate to receive vibrations therefrom. The cantilever elements can be excited into resonance at one or more resonant frequencies. By selection of the shape of the cantilever elements, their position in the microcavity, the spacing of the cantilever elements from the walls of the cavity, and the frequency at which the cantilever elements are excited, the direction of pumping of fluid through the cavity can be controlled, blocked or diverted.
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