发明名称 |
Systems and methods of monitoring thin film deposition |
摘要 |
Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
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申请公布号 |
US6668618(B2) |
申请公布日期 |
2003.12.30 |
申请号 |
US20010840401 |
申请日期 |
2001.04.23 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
LARSON, III JOHN D.;KO HERBERT L.;KARLQUIST RICHARD K.;HUESCHEN MARK A.;CAREY KENT W. |
分类号 |
C23C14/54;G01N29/036;G01N29/30;G01N29/44;(IPC1-7):G01N29/02;G01N21/00;G01N33/00;C23C14/52 |
主分类号 |
C23C14/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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