Vibration-dampening base for ball-type lead screw of load port transfer system

摘要

A vibration-dampening base for a ball-type lead screw of a load port transfer system is disclosed. A load port transfer system includes a vertical arm drive motor assembly, a ball-type lead screw, and a vibration-dampening base connecting the vertical arm drive motor assembly to the ball-type lead screw. The vibration-dampening case can include a cross member into which the ball-type lead screw is disposed, one or more pillar members supporting the cross member, and one or more support stands. Each support stand supports a corresponding one of the one or more pillar members.