| 摘要 |
A position detection apparatus which detects a position of a mark included in an object is disclosed. The apparatus comprises a sensing unit for sensing an image of the object, wherein a plurality of marks included in the object can be included in the image, a extracting unit for extracting feature of a region, other than a region of a target mark of the plurality of marks, of the image sensed by said sensing unit, and a calculating unit for calculating a position of the target mark based on the feature extracted by the extracting unit.
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