发明名称 |
OPTICAL MEASUREMENTS OF LINE EDGE ROUGHNESS |
摘要 |
A method and system for optical measurements of line edge roughness (LER) of patterned structures based on illuminating the structure with incident radiation and detecting a spectral response of the structure, and further applying software and/or hardware utilities for deriving information representative of said line edge roughness parameter/s from said spectral response of the structure |
申请公布号 |
WO03075041(A3) |
申请公布日期 |
2003.12.24 |
申请号 |
WO2003IL00167 |
申请日期 |
2003.03.04 |
申请人 |
NOVA MEASURING INSTRUMENTS LTD.;BRILL, BOAZ |
发明人 |
BRILL, BOAZ |
分类号 |
G01B11/00;G01N21/956;G03F7/20 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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