Fabrication Integration of Micro-Components. A method for manufacturing a first and second mirco-component on a surface of a substrate, including fabricating a first and second constraint structure. The first and second constraint structures are substantially formed to fit a surface of the first and second micro-component, respectively, for positioning the first and second micro-components with respect to each other. The method includes fabricating the first and second micro-components in separate processes. The first and second micro-components have a surface substantially formed to fit the first and second constraint structures, respectively.
申请公布号
WO02071371(A3)
申请公布日期
2003.12.18
申请号
WO2002US13094
申请日期
2002.01.08
申请人
COVENTOR, INCORPORATED;DEREUS, DANA, R.;CUNNINGHAM, SHAWN, J.;MORRIS, ARTHUR, S., III
发明人
DEREUS, DANA, R.;CUNNINGHAM, SHAWN, J.;MORRIS, ARTHUR, S., III