CASSETTE LOADER APPARATUS OF EQUIPMENT FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A cassette loader apparatus of equipment for fabricating a semiconductor device is provided to reduce work loss and improve an operating rate and productivity by easily preventing the cassette inside a loadlock chamber from protruding farther than a predetermined range. CONSTITUTION: A bedplate(32a) supports the lower portion of the cassette to locate the cassette in a predetermined position, separated from the upper portion of a support plate(30a). A rotation unit vertically rotates the front part of the cassette with reference to the rear part of the cassette according to a control signal, supporting the bedplate from the support plate. A state detecting unit(26b) detects whether a mounted wafer protrudes from the cassette farther than a predetermined range, installed in parallel with the disposition direction of a plurality of wafers and corresponding to the front part of the cassette. A control unit receives to determine the detection signal from the state detecting unit and controls the driving of the rotation unit.