发明名称 |
Resonant scanning mirror driver circuit |
摘要 |
A micro-electro-mechanical system (MEMS) resonant scanning mirror driver circuit has separate amplitude and waveshape inputs which allows a relatively slow and therefore inexpensive DAC to be used to control the amplitude of the drive signal for the MEMS device.
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申请公布号 |
US2003230997(A1) |
申请公布日期 |
2003.12.18 |
申请号 |
US20020172579 |
申请日期 |
2002.06.14 |
申请人 |
HAGEN MARK D. |
发明人 |
HAGEN MARK D. |
分类号 |
G02B26/08;(IPC1-7):G05B11/28 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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