SPIN DRYER OF WET CLEANING APPARATUS

摘要

PURPOSE: A spin dryer of a wet cleaning apparatus is provided to be capable of freely controlling exhaust speed and exhaust pressure by improving the structure of the spin dryer. CONSTITUTION: A spin dryer of a wet cleaning apparatus is provided with a predetermined chamber(201), a pedestal(204) installed at the inner portion of the predetermined chamber for loading a wafer, and a driving motor for rotating the pedestal. The spin dryer further includes an outlet port(206) formed at the lower portion of the chamber for exhausting particles and water, an exhaust port(208) connected with the outlet port, an exhaust fan(209) located at the end portion of the exhaust port for smoothly carrying out an exhausting process, and an inverter(210) installed at the inner portion of the exhaust fan for controlling exhaust pressure.