CLEANING AND DRYING DEVICE

摘要

A cleaning and drying device for cleaning and drying in a short time a cassette for receiving a semiconductor wafer or a resin-made container that receives electronic parts and precision machine parts when they are transported and stored. The device is compact and has considerably smaller installation area than conventionally required. A rotation drum (1) is installed in a cleaning vessel, and one or more detachable baskets (2) that receive part-receiving containers (7), etc. are installed in the rotation drum (1) or the part-receiving containers (7), etc. are directly received in the rotation drum (1). Cleaning is performed as the rotation drum (1) is rotated, after that water-removing and drying are carried out by rotating the rotation drum (1) at a high speed, and then drying with hot air is performed.