首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Semiconductor thermal processor with recirculating heater exhaust cooling system
摘要
申请公布号
EP0936662(A3)
申请公布日期
2003.12.17
申请号
EP19990300910
申请日期
1999.02.09
申请人
SILICON VALLEY GROUP, INC.
发明人
BOLTON, DOUGLAS A.;WIESEN, PATRICK W.
分类号
H01L21/324;H01L21/00;(IPC1-7):H01L21/00;F27B17/00;F27B5/16
主分类号
H01L21/324
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Lighting Systems
Hybrid Modular Fixturing Platform
PYROTECHNIC DRIVING DEVICE
Fastener Driving Apparatus
FASTENER DRIVING MACHINE
POLISHING APPARATUS HAVING OPTICAL MONITORING OF SUBSTRATES FOR UNIFORMITY CONTROL AND SEPARATE ENDPOINT SYSTEM
Smooth Finish Tool
METHOD AND APPARATUS FOR PRODUCING FORGING BY ROTARY FORGING
HELIX TOOL LOCKING SYSTEM
Conveying and Cleaning Systems and Methods for Cleaning and Stacking Trays and/or Layer Pads
VAPOR PHASE DEPOSITION OF ORGANIC FILMS
Metered Dosing Method and Mechanisms Thereof
ASPIRATION-FREE WELL PLATE APPARATUS AND METHODS
Rotary Mixer
PROMOTED AMMONIUM SALT-PROTECTED ACTIVATED CARBON SORBENT PARTICLES FOR REMOVAL OF MERCURY FROM GAS STREAMS
PROCESS FOR PURIFYING (HYDRO) FLUOROPROPENES CONTAMINATED WITH HALOGENATED ETHANE
EFFLUENT REMOVAL SYSTEM AND METHOD OF USE
PLASMA GAS WATER IONIZATION PURIFICATION SYSTEM
PORTABLE, ADJUSTABLE SUPPORT STRUCTURE FOR A SPEED BAG
GOLF BALL HAVING MEDIUM POSITIVE GRADIENT QUOTIENT AND LOW TRANS CONTENT
