Method for manufacturing a mechanical conformal grating device with improved contrast and lifetime

摘要

A method of manufacturing a mechanical grating device, including the steps of: forming a spacer layer on a substrate; removing portions of the spacer layer to define an active region; forming a sacrificial layer in the active region; forming conductive reflective ribbon elements over the active region; annealing the mechanical grating device at an annealing temperature greater than 150° C.; and removing the sacrificial layer from the active region to release the conductive reflective ribbon elements.