| 摘要 |
An array of photosensitive devices may be formed with improved fill factors by including a diffractive microlens which may have a stepped configuration. The microlens may be formed of a sol-gel material having a photoinitiator, or other materials that may be defined with low temperature techniques commonly used in connection with photoresist. In particular, a gray scale mask may be used to define a plurality of steps in the resulting microlens which have different diffractive characteristics.
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